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Synthesis and characterization of silicon carbonitride films by plasma enhanced chemical vapor deposition (PECVD) using bis(dimethylamino)dimethylsilane (BDMADMS), as membrane for a small molecule gas separation

Materials ScienceChemical EngineeringEngineeringCarbon-based MaterialNanomaterialsSilicon Carbonitride FilmsChemistryChemical Vapor DepositionPlasma ProcessingThin Film Processing