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Influence of the substrate and nitrogen amount on the microstructural and optical properties of thin r.f.-sputtered ZnO films treated by rapid thermal annealing

Materials ScienceOptical MaterialsNitrogen AmountEngineeringMaterial AnalysisNanotechnologyOptical PropertiesOxide ElectronicsApplied PhysicsRapid Thermal AnnealingThin FilmsPulsed Laser DepositionThin Film Processing