Concepedia

Publication | Closed Access

Moisture-resistant properties of SiNx films prepared by PECVD

DOI

60

Citations

8

References

1998

Year

Hui Lin, Liqiang Xu, Xiang Chen, Xuhong Wang, Sheng Mei, Frank Stubhan, Karlheinz Merkel, Juergen Wilde
Thin Solid Films

References

YearCitations

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