Texture and microstructure of Cr2O3 and (Cr,Al)2O3 thin films deposited by reactive inductively coupled plasma magnetron sputtering - Concepedia

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Publication | Open Access

Texture and microstructure of Cr2O3 and (Cr,Al)2O3 thin films deposited by reactive inductively coupled plasma magnetron sputtering

DOI Full Paper Access

69

Citations

38

References

2010

Year

K.O. Pedersen, J. Bøttiger, M. Sridharan, M. Sillassen, Per Eklund

Thin Solid Films

Materials ScienceMagnetismMaterials EngineeringMaterial AnalysisEngineeringOxide ElectronicsSurface ScienceApplied PhysicsThin FilmsThin Film ProcessingPlasma Magnetron

References

	Year	Citations

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