Concepedia

Publication | Closed Access

Deposition of silicon carbon nitride films by ion beam sputtering

DOI

47

Citations

19

References

1999

Year

Jih‐Jen Wu, C.-T Wu, Yujie Liao, Tsan-Feng Lu, Li–Chyong Chen, Kuei‐Hsien Chen, L.G. Hwa, C.T. Kuo, K. J. Ling
Thin Solid Films

References

YearCitations

Page 1