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Single-phase β-FeSi2 thin films prepared on Si wafer by femtosecond laser ablation and its photoluminescence at room temperature

Materials ScienceRoom TemperatureSi WaferEngineeringFemtosecond Laser AblationApplied PhysicsSemiconductor MaterialSemiconductor Device FabricationThin FilmsSemiconductor Nanostructures