physica status solidi (a) · 2009 · 43 citations · 16 references
Materials ScienceAbstract Nanocrystalline DiamondDiamond-like CarbonNanocrystalline Diamond LayerEngineeringNanomaterialsNanotechnologySurface ScienceApplied PhysicsChemistryThin FilmsChemical DepositionNanosensorNcd Surface ConductivityPlasma ProcessingChemical Vapor Deposition
Abstract Nanocrystalline diamond (NCD) films were grown on gold/Al 2 O 3 substrate using microwave plasma‐enhanced chemical vapor deposition (PECVD) process. The NCD morphology was controlled by the deposition time and it was investigated by scanning electron microscopy (SEM). Gas sensing properties of NCD surface conductivity to humid air, CO 2 , NH 3 , and COCl 2 gases were measured by impedance measurements at room and at high temperature (140 °C). The H‐terminated NCD surface shows a significant response to oxidizing gas (humid air, COCl 2 ) in comparison to reducing gases (CO 2 , NH 3 ).
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Origin of Surface Conductivity in Diamond
Florian Maier, Marc Riedel, B.F. Mantel et al. · Physical Review Letters · 2000 · 919 citations
Materials Science, Diamond-like Carbon, Surface Conductivity +15
Hydrogenating Effect of Single-Crystal Diamond Surface
Tetsuro Maki, Syozo Shikama, M. Komori et al. · Japanese Journal of Applied Physics · 1992 · 174 citations