Biosensor utilizing resist-derived carbon nanostructures

Abstract

The authors present a biosensor using pyrolyzed electron beam resist nanostructures as an active conducting channel. Versatile, arbitrarily shaped nanostructures such as nanowires, nanodots, and suspended nanobridges are fabricated by a facile electron beam resist thermal decomposition method. The nanostructures typically show 15–21nm thickness, 100–200nm width, 0.6nm roughness, and p-type majority conduction with tailored resistivity of 5.2–0.75Ωcm. Streptavidin-biotin binding and pH dependent conductance modulation are demonstrated using pyrolyzed resist based devices.