Surface Roughness Evaluation of Multilayer Coated X-ray Mirrors by Scanning Tunneling Microscope

Abstract

Multilayer X-ray mirrors have been deposited by electron beam evaporation in a high-vacuum system, and the surface irregularities have been investigated by means of a scanning tunneling microscope (STM), the X-ray reflectivity measurement and a stylus profilometer. A good correlation between the STM and the peak X-ray reflectivity has been demonstrated.