Publication | Closed Access
Bandlike and localized states at extended defects in silicon
170
Citations
16
References
1995
Year
EngineeringSilicon On InsulatorDefect ToleranceSemiconductorsElectronic StatesQuantum MaterialsMetal RingDeep-level Transient SpectroscopyElectrical EngineeringPhysicsAtomic PhysicsSemiconductor MaterialDefect FormationQuantum ChemistryMicroelectronicsDislocation InteractionNatural SciencesApplied PhysicsCondensed Matter Physics
We show that electronic states at extended defects in semiconductors can be classified as bandlike or localized using deep-level transient spectroscopy (DLTS), when electron equilibration at the defect is taken into account. We compare computer simulations of DLTS with data for 60\ifmmode^\circ\else\textdegree\fi{} dislocations and for ${\mathrm{NiSi}}_{2}$ platelets in silicon and find narrow point defect clouds in the first and a two-dimensional metal or a metal ring in the second example.
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