A 10Gb/s photonic modulator and WDM MUX/DEMUX integrated with electronics in 0.13/spl mu/m SOI CMOS

Abstract

Monolithic integration of both photonic and electronic components operating at 10Gb/s in a 0.13μm SOI CMOS process for PowerPC processors is presented. A modulator uses free carrier plasma dispersion in a reverse-biased PIN optical phase shifter in a Mach-Zender interferometer. An AWG demultiplexer uses a forward-biased PIN phase shifter to compensate the optical path length improving the channel separation