Publication | Closed Access
The effect of HF/NH4F etching on the morphology of surface fractures on fused silica
162
Citations
26
References
2009
Year
Materials ScienceEngineeringMicrofabricationSurface ScienceMechanical EngineeringSurface TreatmentSurface FracturesCrack FormationPlasma EtchingSurface Processing
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