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Influence of substrate bias on the composition, structure and electrical properties of reactively d.c.-sputtered TiN films

Materials ScienceMaterials EngineeringSurface CharacterizationEngineeringSubstrate BiasD.c.-sputtered Tin FilmsSurface ScienceApplied PhysicsThin Film Process TechnologyThin FilmsChemical DepositionElectrical PropertiesChemical Vapor DepositionThin Film Processing