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OBIC measurements on planar high voltage p+-n junctions with diamond-like carbon films as passivation layer

Diamond-like CarbonElectrical EngineeringObic MeasurementsEngineeringSemiconductor DevicePhysicsNanoelectronicsApplied PhysicsPassivation LayerMicroelectronicsDiamond-like Carbon FilmsOptoelectronicsElectrical Insulation