XPS Investigation of Si ₃ N ₄ /SiC Nanocomposites Prepared Using a Commercial Polymer

Abstract

We have synthesized Si 3 N 4 /SiC nanocomposites using a commercial polymer. Formation behavior of SiC nanoparticles has been studied using X‐ray photoelectron spectroscopy (XPS). Based on the XPS results, we concluded that SiC nanoparticles were formed by a chemical reaction of Si provided from Si 3 N 4 with free carbon obtained by pyrolysis of a polymer around 1300°C. The presence of CN x compounds in samples processed in an Ar atmosphere supported our explanation.