Dual beam experiment for simultaneous irradiation of surfaces with ion species of gaseous and solid-state elements

Abstract

The effects occurring under simultaneous bombardment of surfaces by ions of gaseous and solid elements is a new field for research, which is of great interest for applications ranging from cold plasma technologies to nuclear fusion in magnetically confined plasmas. A multitude of new effects has been observed originating from mixing of incident ion species and bulk material at the surface and, in some cases, from additional complex chemical interactions between the mixing species. To study these effects under controlled conditions a new dual beam experiment has been commissioned, particularly suited for in situ studies of surface sputtering and ion implantation processes. Thin films with negligible impurity level and surface roughness are used as targets. High energy ion beam analysis is used as a means of nondestructive elemental depth profiling and concentration measurements. This allows for the first time the fast quantification of the elemental composition change of a target sample in intervals between ion irradiation. The article describes the details of design and operation, as well as the accessible range of experimental conditions.