Applied Physics Letters · 2002 · 31 citations · 10 references
Natural SciencesMaterials EngineeringMaterials ScienceElectrochemical EngineeringEnergy MaterialsMaterials ChemistryBattery MaterialsBattery TechnologyElectrochemical CellsElectrolyte MaterialsEnergy StorageEnergy Storage MaterialsCurrent Collector MaterialsElectrolyte ChemistryGlass ElectrolytesLithium-ion Battery MaterialsSol-gel ProcessingSolid-state Battery MaterialsSolid-state Lithium BatteriesVery-large-scale Integration
Fabrication and charge/discharge behaviors of all-solid-state Li secondary battery arrays embedded into three Si trenches of 200×100 μm2 in area and 0.5∼2.0 μm in depth are presented. The battery arrays in a Si wafer, consisting of multiple layers (Al current collector/Li/SiO2–15 at. %P2O5/LiMn2O4/polycrystalline silicon current collector), are prepared by combining a sol-gel spin-coating method and Si very-large-scale integration technologies. Porous spin-on glass (SiO2–15 at. %P2O5) is adopted as an electrolyte layer, in which spatial paths for Li+ ions are artificially introduced into the glass. Each active battery area is isolated with double insulating walls (Si3N4/SiO2). The battery arrays demonstrate a constant capacity of ∼9.2 μA h cm−2 at ∼3.6 V up to 100 cycles.
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