Publication | Closed Access
Reactive sputter deposition of zinc oxide: Employing resputtering effects to tailor film properties
43
Citations
15
References
2005
Year
Materials EngineeringMaterials ScienceEngineeringFilm PropertiesOxide ElectronicsApplied PhysicsZinc OxideThin FilmsReactive Sputter DepositionChemical DepositionChemical Vapor DepositionThin Film Processing
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