Calculation of the effective gas interaction probabilities of the secondary electrons in a dc magnetron discharge

Abstract

In sputter magnetrons the electrons emitted from the target, the so-called secondary electrons (SE), can be recaptured by the target. As a result, not all emitted SE will interact with the discharge gas. The effective gas interaction probability (EGIP) is the probability that an emitted SE interacts with the discharge gas, and thus is not recaptured by the target. To calculate the EGIP an analytical model is developed. The model is verified by comparing its results with those of a Monte Carlo model.