Publication | Closed Access
Oxidation behavior of AlN films at high temperature under controlled atmosphere
64
Citations
15
References
2007
Year
Materials ScienceMaterials EngineeringChemical EngineeringAluminium NitrideEngineeringOxidation BehaviorCorrosionOxidation ResistanceApplied PhysicsThin FilmsChemical DepositionHigh TemperatureChemical Vapor DepositionAln FilmsAnodizing
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