Concepedia

Publication | Closed Access

Automatic Langmuir probe measurement in a magnetron sputtering system

DOI

31

Citations

7

References

1999

Year

M. Spolaore, V. Antoni, M. Bagatin, A. Buffa, R. Cavazzana, Daniele Desideri, E. Martines, N. Pomaro, G. Serianni, L. Tramontin
Surface and Coatings Technology

References

YearCitations

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