Porous Silicon Gas Sensors for Room Temperature Detection of Ammonia and Phosphine

Abstract

Nanopore covered microporous porous silicon (PS) interfaces have been formed to provide an active scaffolding for the creation of rapidly responding, reversible, and sensitive, (< 1ppm) PS gas sensors, operating at room temperature, and based on a uniquely formed highly efficient electrical contract to the nanopore covered microporous array. These sensors are modified on the basis of a general acid-base theory, introducing active nanoparticles to establish gas selectivity. NH3 and PH3 have been monitored well below the ppm level.