Concepedia

Deposition of SiO2 and TiO2 thin films by plasma enhanced chemical vapor deposition for antireflection coating

C. Martinet, Vincent Paillard, A. Gagnaire, J. Joseph

Journal of Non-Crystalline Solids · 1997 · 166 citations · 20 references

DOI

Concepts

References

20

<i>Ellipsometry and Polarized Light</i>

R. M. A. Azzam, N. M. Bashara, Stanley S. Ballard · Physics Today · 1978 · 4.3K citations

, , +13

Ellipsometry and Polarized Light

L. Cox · Optica Acta International Journal of Optics · 1978 · 1.9K citations

, , +9

Investigation of effective-medium models of microscopic surface roughness by spectroscopic ellipsometry

D. E. Aspnes, J. B. Theeten, F. Hottier · Physical review. B, Condensed matter · 1979 · 1K citations

, , +17

Optimized antireflection coatings for high-efficiency silicon solar cells

Jianhua Zhao, Martin A. Green · IEEE Transactions on Electron Devices · 1991 · 451 citations

, , +17

Low Temperature Chemical Vapor Deposition Method Utilizing an Electron Cyclotron Resonance Plasma

Seitaro Matsuo, Mikiho Kiuchi · Japanese Journal of Applied Physics · 1983 · 395 citations

, , +17