Deposition of SiO2 and TiO2 thin films by plasma enhanced chemical vapor deposition for antireflection coating - Concepedia

Concepedia

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Deposition of SiO2 and TiO2 thin films by plasma enhanced chemical vapor deposition for antireflection coating

165

Citations

20

References

1997

Year

C. Martinet, Vincent Paillard, A. Gagnaire, J. Joseph

Journal of Non-Crystalline Solids

Materials ScienceThermal Spray CoatingEngineeringSurface ScienceApplied PhysicsAntireflection CoatingThin FilmsTio2 Thin FilmsChemical DepositionPlasma ProcessingChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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