Publication | Closed Access
Field emission of nanostructured amorphous SiCN films deposited by reactive magnetron sputtering of SiC in CH4/N2 atmosphere
25
Citations
31
References
2002
Year
Materials EngineeringMaterials ScienceCh4/n2 AtmosphereEngineeringNanotechnologyApplied PhysicsField EmissionThin Film ProcessingCarbideReactive Magnetron Sputtering
| Year | Citations | |
|---|---|---|
Page 1
Page 1