Formation of carbon nitride films by reactive high-density plasma sputtering with excitation of m=0 mode helicon wave - Concepedia

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Formation of carbon nitride films by reactive high-density plasma sputtering with excitation of m=0 mode helicon wave

14

Citations

16

References

1999

Year

Shoji Miyake, Yuichi Setsuhara, Kazuki Shibata, Masao Kumagai, Y. Sakawa, T. Shoji

Surface and Coatings Technology

Materials EngineeringMaterials ScienceEngineeringPhysicsNanoelectronicsSurface ScienceApplied PhysicsGas Discharge PlasmaPlasma ApplicationPlasma ProcessingReactive High-density Plasma

References

	Year	Citations

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