Concepedia

Publication | Closed Access

Selective effect of ion/surface interaction in low frequency PACVD of SIC:H films: Part B. Microstructural study

DOI

45

Citations

38

References

2005

Year

Audrey Soum‐Glaude, L. Thomas, E. Tomasella, J. M. Badie, R. Berjoan
Surface and Coatings Technology

References

YearCitations

Page 1