Philosophical magazine. A/Philosophical magazine. A. Physics of condensed matter. Structure, defects and mechanical properties · 1979 · 21 citations · 5 references
EngineeringMaterials EngineeringMaterials ScienceOptical MaterialsOpticsPhotonicsDislocations In SemiconductorsSemiconductor DefectsSilicon MaterialsSilicon PhotonicsBirefringenceBirefringence ImagingDislocation LinesDislocationsEdge DislocationsImage Intensifier SystemsSiliconSilicon Wafers
Abstract Using a 50 mW HeNe infrared laser as the light source and a micro channel-plate image intensifier/converter, grown-in dislocations were observed in 2 to 3 mm thick silicon (111) slices. All the dislocations imaged followed the visibility criteria set by Tanner and Fathers (1974) for pure edge dislocations.
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