Publication | Closed Access
Growth of HfO2 films using an alternate reaction of HfCl4 and O2 under atmospheric pressure
16
Citations
17
References
2004
Year
Materials ScienceMaterials EngineeringHfo2 FilmsEngineeringSurface ScienceAlternate ReactionAtmospheric PressureHydrogenChemistryChemical Vapor DepositionThin Film Processing
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