Influence of process parameters on diamond film CVD in a surface-wave driven microwave plasma reactor - Concepedia

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Influence of process parameters on diamond film CVD in a surface-wave driven microwave plasma reactor

12

Citations

23

References

1996

Year

C. F. M. Borges, L. St-Onge, Michel Moisan, A. Gicquel

Thin Solid Films

Diamond-like CarbonEngineeringProcess ParametersApplied PhysicsSurface-wave DrivenGas Discharge PlasmaPlasma ApplicationPlasma ProcessingDiamond Film Cvd

References

	Year	Citations

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