Publication | Closed Access
Microwave plasma chemical vapour deposition of diamond like carbon thin films
28
Citations
19
References
1998
Year
Materials ScienceDiamond-like CarbonEngineeringCarbon Thin FilmsNanoelectronicsApplied PhysicsChemical Vapor DepositionThin FilmsChemical VapourGas Discharge PlasmaPlasma Processing
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