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Influences of bias voltage on the crystallographic orientation of AlN thin films prepared by long-distance magnetron sputtering

Materials EngineeringSpintronicsMaterials ScienceMaterial AnalysisEngineeringLong-distance Magnetron SputteringPhysicsAluminium NitrideSurface ScienceApplied PhysicsCondensed Matter PhysicsBias VoltageThin FilmsAln Thin FilmsThin Film Processing