Zr–Ti–Ni thin film metallic glass as a diffusion barrier between copper and silicon - Concepedia

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Zr–Ti–Ni thin film metallic glass as a diffusion barrier between copper and silicon

37

Citations

32

References

2014

Year

Chih-Wei Wang, Pakman Yiu, Jinn P. Chu, C.H. Shek, Chun‐Hway Hsueh

Journal of Materials Science

Materials ScienceEngineeringSurface ScienceApplied PhysicsGlass MaterialThin Film Process TechnologyThin FilmsThin Film ProcessingDiffusion Barrier

References

	Year	Citations

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