Publication | Closed Access
Preparation of metal (W, Mo, Nb, Ti) containing a-C:H films by reactive magnetron sputtering
77
Citations
20
References
2004
Year
Materials ScienceMagnetismMaterials EngineeringEngineeringSurface ScienceApplied PhysicsThin FilmsChemical DepositionH FilmsChemical Vapor DepositionThin Film ProcessingReactive Magnetron Sputtering
| Year | Citations | |
|---|---|---|
Page 1
Page 1