Nano-particle size-dependent charging and electro-deposition in dielectric barrier discharges at atmospheric pressure for thin SiO<sub><i>x</i></sub>film deposition - Concepedia

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Nano-particle size-dependent charging and electro-deposition in dielectric barrier discharges at atmospheric pressure for thin SiO<sub><i>x</i></sub>film deposition

DOI Full Paper Access

46

Citations

22

References

2007

Year

N. Jidenko, Carmen Jiménez, F. Massines, J-P Borra

Journal of Physics D Applied Physics

Abstract

International audience

References

	Year	Citations

Page 1