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Direct Measurement of Electron Emission from Defect States at Silicon Grain Boundaries
78
Citations
7
References
1979
Year
Electrical EngineeringSemiconductor DeviceEngineeringPhysicsDefect StatesNanoelectronicsGrain-boundary StatesSilicon DebuggingApplied PhysicsElectron EmissionCharge EmissionElectron SpectroscopySilicon Grain BoundariesSemiconductor Device FabricationDefect FormationDefect ToleranceElectrical InsulationMicroelectronics
The first direct measurements of charge emission from silicon grain-boundary defect states have been made by monitoring the recovery of the nonequilibrium grain-boundary barrier capacitance. The density of grain-boundary states obtained in this fashion is in excellent agreement with the values found from deconvoluting room-temperature $I\ensuremath{-}V$ data. These data are shown to suggest strongly that the double-depletion-layer/thermal-emission model gives a good description of silicon grain boundaries.
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