Fine Patterning of Hybrid Titania Films by Ultraviolet Irradiation

Abstract

Photosensitive hybrid titania films have been prepared from titanium butoxide modified with β‐diketone and methacrylic acid. When this film is exposed to UV light, the β‐diketonato chelate from the alkoxide and β‐diketone is dissociated, and the unsaturated hydrocarbon of methacrylic acid is polymerized. These structural changes in the gel film have led to a difference between the solubility of irradiated and unirradiated parts in the film; therefore, a fine patternable hybrid titania film has been fabricated.