Plasma immersion ion implantation using a glow discharge source with controlled plasma potential - Concepedia

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Plasma immersion ion implantation using a glow discharge source with controlled plasma potential

14

Citations

4

References

2000

Year

G. F. Gomes, L. A. Berni, J.O. Rossi, Joaquim J. Barroso, A.F. Beloto, E. Abramof, H. Reuther

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

Electrical EngineeringIon ImplantationEngineeringControlled Plasma PotentialGlow DischargeElectrophysiologyBiomedical EngineeringGas Discharge PlasmaPlasma ApplicationGlow Discharge Source

References

	Year	Citations

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