Japanese Journal of Applied Physics · 1988 · 22 citations · 0 references
Natural SciencesElectrical EngineeringMaterials ScienceElectronic MaterialsMetallic MaterialsThin FilmsDurabilityElectrode MaterialsMaterial DurabilityMetalsMicrowave FiltersThin Film Electrical PropertiesAlloy DepositionDevice DurabilityElectrode Degradation MechanismsFilm DepositionMagnetron SputteringOptimum TemperatureSputteringTemperature Optimum
Durability of aluminum-alloy electrodes for high power SAW filters which are used for antenna duplexers in cellular portable telephones is experimentally investigated. Titanium added aluminum is deposited by DC magnetron sputtering. The new alloy expands the limitation on the driving power of the filters. Temperature, particularly, accelerates the degradation of the high power filters, the film resistance causes an even greater increase in temperature. Thus, optimum value for titanium of 0.4 wt.% can be achieved for high durability filters.