Publication | Closed Access

Influence of oxygen content on structure and properties of multi-element AlCrSiON oxynitride thin films

Materials EngineeringMaterials ScienceChemical EngineeringAluminium NitrideEngineeringOxidation ResistanceOxide ElectronicsSurface ScienceThin FilmsMulti-element AlcrsionOxygen ContentThin Film Processing