Application of Taguchi robust design method to SAW mass sensing device

Abstract

It is essential that measurement systems provide an accurate and robust performance over a wide range of input conditions. This paper adopts Taguchi's signal-to-noise ratio (SNR) analysis to develop a robust design for the Rayleigh surface acoustic wave (SAW) gas sensing device operated in a conventional delay-line configuration. The goal of the present Taguchi design activity is to increase the sensitivity of this sensor while simultaneously reducing its variability. A time- and cost-efficient finite-element analysis method is used to investigate the effects on the sensor's response output of variations in the carbon dioxide (CO2) gas deposited mass. The simulation results for the resonant frequency and wave mode analysis are all shown to be in good agreement with the values predicted theoretically.