Publication | Closed Access
The growth of ?- and ?-Si3N4 accompanying the nitriding of silicon powder compacts
30
Citations
6
References
1978
Year
Materials EngineeringMaterials ScienceEngineeringSilicon Powder CompactsCubic Boron NitrideSurface ScienceApplied PhysicsSiliceneSemiconductor Device FabricationChemistrySilicon On InsulatorMicrostructure
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