Erbium-doped waveguide amplifiers fabricated using focused proton beam writing

Abstract

Buried channel waveguides were fabricated in Er3+–Yb3+ codoped phosphate glasses using focused proton beam writing. Proton ion doses in the range of 1014–1015 ions/cm2 and 2.0 MeV energy were used. The waveguides were located 38 μm below the substrate surface and are in excellent agreement with the transport and range of ions in matter simulation. The waveguide properties were measured, and the fluorescence spectra and optical gain of the waveguides were characterized. The maximum net gain of the waveguide amplifiers at 1.534 μm wavelength was measured to be ∼1.72 dB/cm with 100 mW pump power at 975 nm wavelength.