Low-loss silica-on-silicon two-dimensional Fabry–Perot cavity based on holographic Bragg reflectors

Abstract

We report on the demonstration of an integrated slab-waveguide-based concentric Fabry-Perot resonator that employs holographic Bragg reflectors as cavity mirrors. The cavity, produced in a low-loss silica-on-silicon slab waveguide by high-fidelity deep-ultraviolet photolithographic fabrication, exhibits a reflectivity-limited Q factor of approximately 10(5). Increasing the mirror's reflectivity will provide Q values similar to those of silica-based ring resonators, whereas the folded Fabry-Perot resonator design allows access to a substantially larger free spectral range by cavity shortening.