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Independently addressable InGaAs/GaAs vertical-cavity surface-emitting laser arrays
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1991
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PhotonicsElectrical EngineeringIon ImplantationEngineeringAdvanced Laser ProcessingApplied PhysicsLaser ApplicationsPlanar Ion-implantation ProcessesSimultaneous AddressingLaser CharacteristicsLaser MaterialLaser-assisted DepositionSurface-emitting LasersOptoelectronicsHigh-power Lasers
The fabrication of an 8 × 8 independently addressable InGaAs/GaAs vertical-cavity surface-emitting laser array based on planar ion-implantation processes is described. The uniformity of laser characteristics across the array under both pulsed and CW operation is discussed. Simultaneous addressing of multiple lasers is demonstrated.