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dc field and temperature dependent acoustic resonances in parallel-plate capacitors based on SrTiO3 and Ba0.25Sr0.75TiO3 films: Experiment and modeling
98
Citations
18
References
2006
Year
Electrical EngineeringEngineeringHigh-frequency DeviceBa0.25sr0.75tio3 FilmsPiezoelectric EffectsAcoustic MetamaterialApplied PhysicsDc FieldElectric FieldElectric Field DependenceUltrasoundMicroelectronicsMicrowave EngineeringParallel-plate Capacitors
Experimentally observed resonant absorption peaks in frequency dependent loss tangent in thin film parallel-plate SrTiO3 and Ba0.25Sr0.75TiO3 capacitors are explained by electrostriction and piezoelectric effects. A simple theory (linear approximation) is proposed to model the electric field and temperature dependences of the acoustic resonant frequencies, and the intensities of the microwave into acoustic transformations. The electric field dependence of the acoustic resonant frequencies may be used to develop tunable thin film bulk acoustic wave resonators (TFBARs) operating at frequencies up to 10GHz and above. The expected tuneability of the TFBARs is more than 5%.
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