Excimer laser annealed poly-Si thin film transistor with self-aligned lightly doped drain structure - Concepedia

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Excimer laser annealed poly-Si thin film transistor with self-aligned lightly doped drain structure

13

Citations

12

References

2003

Year

Yong-Hae Kim, Chi‐Sun Hwang, Yoon‐Ho Song, Choong‐Heui Chung, Young-Wook Ko, Choong-Yong Sohn, Bong-Chul Kim, Jin Ho Lee

Thin Solid Films

Electrical EngineeringEngineeringApplied PhysicsExcimer LaserDrain StructureSemiconductor Device FabricationSilicon On InsulatorOptoelectronicsSemiconductor Device

References

	Year	Citations

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