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Effect of duty cycles on the deposition and characteristics of high power impulse magnetron sputtering deposited TiN thin films

Materials ScienceMaterials EngineeringElectrical EngineeringEngineeringApplied PhysicsTin Thin FilmsThin Film DevicesChemical Vapor DepositionThin FilmsChemical DepositionMicroelectronicsDuty CyclesThin Film Processing