Some Structural and Optical Properties of CdS Thin Films Prepared by RF Sputtering

Abstract

Stable CdS thin films were prepared by radio frequency sputtering onto glass substrates from a CdS target (purity 4N). The as-grown films were thermally annealed under vacuum at 100 and 150 °C. The effect of the annealing temperatures on the structural and optical properties of the films was investigated. Grazing incidence X-ray diffraction (GIXD) studies show that the CdS films annealed at 150 °C were continuous and homogeneous as opposed to the as-deposited and the films annealed at 100 °C.