Hardness and elastic modulus of TiN based on continuous indentation technique and new correlation

Abstract

Young’s modulus and hardness of TiN films are reported. The films, deposited on 440C stainless steel, range between 0.25 and 1.0 μm in thickness. They fall to within 3% of stoichiometry and have a 〈111〉 texture. Within experimental resolution, the properties of films with different thickness are indistinguishable: calculated values of Young’s modulus and hardness are 550±50 GPa and 31±4 GPa, respectively. Properties are obtained from a continuous indentation technique. A new correlation is used for identifying whether all films have the same properties, independent of thickness, and for measuring hardness of thin films. The same correlation is utilized for measuring machine compliance and obtaining the profile of the indenter tip. An elasticity analysis aids in obtaining elastic modulus from compliance data.