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Fabrication of Hierarchically Ordered Hybrid Structures over Multiple Length Scales via Direct Etching of Self-Organized Polyhedral Oligomeric Silsesquioxane (POSS) Functionalized Block Copolymer Films

Materials ScienceBlock Co-polymersEngineeringPolymer HybridMicrofabricationMultiple Length ScalesSelf-assemblyPolymer ScienceApplied PhysicsDirect EtchingNanostructured PolymerPolymer Self-assemblyPolymer Chemistry